Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators

Fumiya Shono, Noriyuki Mouri, Takehiro Higuchi, Ohmi Fuchiwaki

Abstract

In this paper, we report the simulation result of a precise 3-axial servo controller for a positioning mechanism in an inchworm mobile mechanism. Also, we describe the design of bang-bang controller for θ-axis that is required for developing 3-axial controller. The inchworm mobile mechanism is composed of 6 piezoelectric actuators (PAs) and a pair of electromagnets (EMs). If one EM is fixed to a ferromagnetic floor, then another EM can position the X, Y, and θ axes by 6 PAs. In a previous study, we have developed 3-axial proportional-integral-derivative (PID) controls with a 50 nm resolution for the mechanism with 4 linear encoders to measure the 3DoF motion of the free magnet precisely However, we concluded that we require over 100 ms of settling time because of mutual coupling effects among the X, Y, and θ axes when using the PID controller. To be robust against the disturbance and also reduce settling time, we developed a new servo controller in this study. To achieve sufficient working efficiency, we aimed at establishing of 3-axial servo control on the nanometer scale that can realize a ±0.5 μm positioning repeatability, and less than 10 ms of settling time over a 50 μm×50 μm positioning range.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1533-1538
Number of pages6
Volume2016-September
ISBN (Electronic)9781509020652
DOIs
StatePublished - 2016 Sep 26
Event2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016 - Banff, Canada

Other

Other2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016
CountryCanada
CityBanff
Period16/7/1216/7/15

Fingerprint

Controllers
Electromagnets
Piezoelectric actuators
Derivatives
State feedback
Magnets

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications
  • Software

Cite this

Shono, F., Mouri, N., Higuchi, T., & Fuchiwaki, O. (2016). Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators. In 2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016. (Vol. 2016-September, pp. 1533-1538). [7576988] Institute of Electrical and Electronics Engineers Inc.. DOI: 10.1109/AIM.2016.7576988

Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators. / Shono, Fumiya; Mouri, Noriyuki; Higuchi, Takehiro; Fuchiwaki, Ohmi.

2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. p. 1533-1538 7576988.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shono, F, Mouri, N, Higuchi, T & Fuchiwaki, O 2016, Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators. in 2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016. vol. 2016-September, 7576988, Institute of Electrical and Electronics Engineers Inc., pp. 1533-1538, 2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016, Banff, Canada, 12-15 July. DOI: 10.1109/AIM.2016.7576988
Shono F, Mouri N, Higuchi T, Fuchiwaki O. Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators. In 2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016. Vol. 2016-September. Institute of Electrical and Electronics Engineers Inc.2016. p. 1533-1538. 7576988. Available from, DOI: 10.1109/AIM.2016.7576988

Shono, Fumiya; Mouri, Noriyuki; Higuchi, Takehiro; Fuchiwaki, Ohmi / Simulation of 3-axis state feedback controller with bang-bang control for positioning mechanism driven by 6 piezoelectric actuators.

2016 IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. p. 1533-1538 7576988.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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