Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts

Christopher L. Ayala, Daniel Grogg, Antonios Bazigos, Simon J. Bleiker, Montserrat Fernandez-Bolaños, Frank Niklaus, Christoph Hagleitner

  • 4 Citations

Abstract

Abstract Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring oscillator built using cell-level digital logic elements based on curved NEM switches. The ring oscillator core occupies an area of 30 μm × 10 μm using 6 NEM switches. Each NEM switch device has a footprint of 5 μm × 3 μm, an air gap of 60 μm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz, and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator are key milestones on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.

Original languageEnglish
Article number6818
Pages (from-to)157-166
Number of pages10
JournalSolid-State Electronics
Volume113
DOIs
StatePublished - 2015 Jul 20
Externally publishedYes

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Switches
Amorphous carbon
Logic circuits
Digital circuits
Transistors
Electronic equipment
Demonstrations
Fabrication
Air

Keywords

  • Amorphous carbon
  • Curved cantilever
  • Digital logic design
  • NEMS
  • Ring oscillator
  • VLSI

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

Cite this

Ayala, C. L., Grogg, D., Bazigos, A., Bleiker, S. J., Fernandez-Bolaños, M., Niklaus, F., & Hagleitner, C. (2015). Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts. Solid-State Electronics, 113, 157-166. [6818]. DOI: 10.1016/j.sse.2015.05.029

Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts. / Ayala, Christopher L.; Grogg, Daniel; Bazigos, Antonios; Bleiker, Simon J.; Fernandez-Bolaños, Montserrat; Niklaus, Frank; Hagleitner, Christoph.

In: Solid-State Electronics, Vol. 113, 6818, 20.07.2015, p. 157-166.

Research output: Contribution to journalArticle

Ayala, CL, Grogg, D, Bazigos, A, Bleiker, SJ, Fernandez-Bolaños, M, Niklaus, F & Hagleitner, C 2015, 'Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts' Solid-State Electronics, vol 113, 6818, pp. 157-166. DOI: 10.1016/j.sse.2015.05.029
Ayala CL, Grogg D, Bazigos A, Bleiker SJ, Fernandez-Bolaños M, Niklaus F et al. Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts. Solid-State Electronics. 2015 Jul 20;113:157-166. 6818. Available from, DOI: 10.1016/j.sse.2015.05.029

Ayala, Christopher L.; Grogg, Daniel; Bazigos, Antonios; Bleiker, Simon J.; Fernandez-Bolaños, Montserrat; Niklaus, Frank; Hagleitner, Christoph / Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts.

In: Solid-State Electronics, Vol. 113, 6818, 20.07.2015, p. 157-166.

Research output: Contribution to journalArticle

@article{2c36dda96e3d418994e09aeaf49b351b,
title = "Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts",
keywords = "Amorphous carbon, Curved cantilever, Digital logic design, NEMS, Ring oscillator, VLSI",
author = "Ayala, {Christopher L.} and Daniel Grogg and Antonios Bazigos and Bleiker, {Simon J.} and Montserrat Fernandez-Bolaños and Frank Niklaus and Christoph Hagleitner",
year = "2015",
month = "7",
doi = "10.1016/j.sse.2015.05.029",
volume = "113",
pages = "157--166",
journal = "Solid-State Electronics",
issn = "0038-1101",
publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts

AU - Ayala,Christopher L.

AU - Grogg,Daniel

AU - Bazigos,Antonios

AU - Bleiker,Simon J.

AU - Fernandez-Bolaños,Montserrat

AU - Niklaus,Frank

AU - Hagleitner,Christoph

PY - 2015/7/20

Y1 - 2015/7/20

N2 - Abstract Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring oscillator built using cell-level digital logic elements based on curved NEM switches. The ring oscillator core occupies an area of 30 μm × 10 μm using 6 NEM switches. Each NEM switch device has a footprint of 5 μm × 3 μm, an air gap of 60 μm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz, and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator are key milestones on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.

AB - Abstract Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring oscillator built using cell-level digital logic elements based on curved NEM switches. The ring oscillator core occupies an area of 30 μm × 10 μm using 6 NEM switches. Each NEM switch device has a footprint of 5 μm × 3 μm, an air gap of 60 μm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz, and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator are key milestones on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.

KW - Amorphous carbon

KW - Curved cantilever

KW - Digital logic design

KW - NEMS

KW - Ring oscillator

KW - VLSI

UR - http://www.scopus.com/inward/record.url?scp=84937250804&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84937250804&partnerID=8YFLogxK

U2 - 10.1016/j.sse.2015.05.029

DO - 10.1016/j.sse.2015.05.029

M3 - Article

VL - 113

SP - 157

EP - 166

JO - Solid-State Electronics

T2 - Solid-State Electronics

JF - Solid-State Electronics

SN - 0038-1101

M1 - 6818

ER -