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Research Output 1982 2016

  • 907 Citations
  • 17 h-Index
  • 90 Article
  • 36 Conference contribution
  • 5 Chapter
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Chapter
2015

Amorphous silicon carbide thin film formation at room temperature

Habuka, H. 2015 Jan 1 Advances in Materials Science Research. Nova Science Publishers, Inc., Vol. 18, p. 107-152 46 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Silicon
Silicon carbide
Temperature
Thin films
Hydrogen

Chlorine trifluoride dry etching for silicon carbide material production process

Habuka, H. H. 2015 Jan 1 Advances in Materials Science Research. Nova Science Publishers, Inc., Vol. 19, p. 43-82 40 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Silicon carbide
Etching
Gases
Temperature
Chlorine
2012

Transport and chemical processes for semiconductor silicon epitaxial film formation

Habuka, H. 2012 Feb 1 Thick Films: Properties, Technology and Applications. Nova Science Publishers, Inc., p. 1-126 126 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Silicon
Gases
Hydrogen
Epitaxial films
Chemical reactions
2011

Etching and thin film formation of silicon carbide using highly reactive gases

Habuka, H. 2011 Dec 1 Silicon Carbide: New Materials, Production Methods and Applications. Nova Science Publishers, Inc., p. 1-56 56 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Silicon carbide
Etching
Thin films
Gases
1983
46 Citations

DIELECTRIC BEHAVIOR AND FERROELECTRIC TRANSITION OF COPOLYMERS OF VINYLIDENE FLUORIDE AND TRIFLUOROETHYLENE.

Koizumi, N., Haikawa, N. & Habuka, H. 1983 Jun Ferroelectrics. 1-4 ed. Vol. 57, p. 99-119 21 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Ferroelectric materials
Copolymers
Thermal expansion
Enthalpy
Physical properties