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Engineering & Materials Science

Gases
Silicon
Temperature
Silicon carbide
Substrates
Hydrogen
Chlorine
Etching
Epitaxial growth
Atmospheric pressure
Water
Chemical vapor deposition
Silicon wafers
Epitaxial films
Thin films
Cleaning
Crystals
Contamination
Chemical reactions
Desorption
Adsorption
Annealing
Organic compounds
Precipitates
Quartz crystal microbalances
Flow of gases
Nitrogen
Film growth
Amorphous silicon
Boron
Carbon
Argon
Oxide films
Plasmas
Hafnium oxides
Rapid thermal processing
Rate constants
Quartz